Wayne State University

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Yong Xu

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Associate Professor, Electrical and Computer Engineering
313-577-3850 (Phone)
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Education

Ph.D., 2002, Electrical Engineering, California Institute of Technology, Pasadena, CA

Research Group: Caltech Micromachining Lab

Thesis title: Flexible MEMS Skin Technology for Distributed Fluidic Sensing.

M. S., 1998, Electrical Engineering, California Institute of Technology, Pasadena, CA

B. S., 1997, Electronic Engineering, Tsinghua University, Beijing, China

Research Interests

MEMS, biomedical electronics, nanotechnology

Publications
  • Hongen Tu, Qinglong Zheng, and Yong Xu,” Preliminary study of resonant mass sensors based on asymmetrically-gapped cantilevers”, IEEE Sensors Journal, vol. 11, no. 5, pp 1107 – 1111, 2011.
  • Yuefa Li, Qinglong Zheng, Yating Hu, and Yong Xu, “Micromachined Piezoresistive Accelerometers Based on an Asymmetrically Gapped Cantilever”, Journal of Microelectromechanical Systems, vol. 20, no. 1, pp 83-94, 2011.
  • Yating Hu, Rakesh. B. Katragadda, Hongen Tu, Qinglong Zheng, Yuefa Li, and Yong Xu, “Bio-inspired 3-D Tactile Sensor for Minimally Invasive Surgery”, Journal of Microelectromechanical Systems, vol. 19, no. 6, pp 1400-1408, 2010. 
  • Q. Zheng and Y. Xu, “Asymmetric air-spaced cantilevers for vibration energy harvesting”, Smart Materials and Structures, 17 (2008) 055009 (6pp).
  • Q. Zheng, Z. Wang, and Y. Xu, “Symmetric air-spaced cantilevers for strain sensing", Sensors & Actuators: A. Physical, vol 147 pp. 142–149, 2008.
  • K. Zheng, W. Khalid, Z. Wang, Y. Li, R. B. Katragadda, Y. Zhao, Q. Lin and Y. Xu, “Optical lever based parylene cantilevers for biochemical sensing”, The Open Optics Journal, vol 2, pp.86-93 (8).
  • Z. Wang, Y. Xu, “Theoretical and experimental study of annular plate self-sealing structures”, Journal of Microelectromechanical Systems, vol 7, no 1, pp 185-192, 2008.
  • L. Wang, D. M. Sipe, Y. Xu, and Q. Lin, “A MEMS thermal biosensor for metabolic monitoring applications”, Journal of Microelectromechanical Systems, vol. 17, no. 2, pp 318-327, 2008.
  • Y. F. Li, Q. Zheng, R. Katragadda, Z. Wang, R. Panguluri, B. Nadgorny, P. M. Hoffmann, and Y. Xu, “Development of micro scanning multiprobes for material characterization”, Sensor Letters, Vol. 6, No. 2, pp. 299-304(6), 2008.
  • R. B. Katragadda and Y. Xu, “A novel intelligent textile technology based on silicon flexible skins”, Sensors and Actuators, vol 143, pp. 169-174, 2008.
  • R. B. Katragadda, Z. Wang, W. Khalid, Y. Li and Y. Xu. “Parylene cantilevers integrated with polysilicon piezoresistors for surface stress sensing”, Applied Physics Letters, 91, 083505, 2007.
  • Z. Wang and Y. Xu, “Design and optimization of an ultra-sensitive piezoresistive accelerometer for continuous respiratory sound monitoring”, Sensor Letters, 5, pp. 450-458, 2007
  • Z. Wang and Y. Xu, “Vibration energy harvesting device based on air-spaced piezoelectric cantilevers”, Applied Physics Letters, 90, 263512, 2007.
  • Z. Wang, Y. Xu, and Y. Zhao, “Aberration analyses of liquid zooming lenses without moving parts”, Optics Communications, 275, pp. 22-26, 2007.
  • Y. Xu, C.-W. Chiu, F. Jiang, Q. Lin, and Y.-C. Tai, "A MEMS multi-sensor chip for gas flow sensing," Sensors & Actuators A: Physical, vol. 121, pp. 253-261, 2005. 
  • Y. Xu, Q. Lin, G. Lin, F. Jiang, S. Tung, and Y.-C. Tai, "Micromachined thermal shear-stress sensor for underwater applications," Journal of Microelectromechanical Systems, vol. 14,  pp.1023-1030, 2005.
  • Q. Lin, Y. Xu, F. Jiang, Y.-C. Tai, and C.-M. Ho “A parametrized three-dimensional model for MEMS thermal shear-stress sensors”, Journal of Microelectromechanical systems, vol. 14,  pp. 625-633, 2005.
  • Q. Lin, F. Jiang, X.-Q Wang, Y. Xu, Z. Han, Y-C. Tai, J. Lew, and C.-M. Ho, “Experiments and simulations of MEMS thermal sensors for wall shear stress measurements in aerodynamic control,” Journal of Microengineering and Micromechanics, vol. 14, pp. 1640-1649, 2004.
  • A. Huang, J. Lew, Y. Xu, Y.-C. Tai, and C.-M. Ho, “Micro sensors and actuators for macro fluidic control”, IEEE Sensors, vol. 4, pp. 494-502, 2004.
  • Y. Xu, Y.-C. Tai, A. Huang, and C.-M. Ho, "IC-Integrated flexible shear-stress sensor skin," Journal of Microelectromechanical Systems, vol. 12, pp. 740-747, 2003.
  • Y. Xu, F. Jiang, Y.-C. Tai, A. Huang, C.-M. Ho, and S. Newbern, "Flexible shear-stress sensor skin and its application to unmanned aerial vehicle", Sensors and Actuators A: Physical, vol. 105, pp. 321-329, 2003.
Papers and Conferences
  • H.Tu, Y. Li, P. Finlayson, R. Iezzi, and Y. Xu, “Individually-addressable parylene microneedle arrays with integrated microchannels for retinal prosthesis study”, The 16th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers’11), June 5-9, 2011, Beijing, China.
  • Qinglong Zheng, Yunfeng Zhang, Ying Lei, Jiakun Song and Yong Xu, “Haircell-inspired Capacitive Accelerometer with Both High Sensitivity and Broad Dynamic Range”, the 9th IEEE Sensors Conference, Waikoloa, HI, USA, November 1-4, 2010.
  • Yating Hu, Qinglong Zheng, and Yong Xu, “High performance atomic force microscope based on air-spaced piezoresistive cantilevers”, the 9th IEEE Sensors Conference, Waikoloa, HI, USA, November 1-4, 2010.
  • Yuefa Li, Jessin John, Xueguo Zhang, Jinsheng Zhang, Jeffrey Loeb and Yong Xu, "3D neural probes with combined electrical and chemical interfaces," Hilton Head Workshop 2010: A Solid-State Sensors, Actuators and Microsystems Workshop, Hilton Head Island, SC, June 6-10, 2010.
  • 1.      Dan Xiang, Yubing Yang, Zhubing Ren, Yuefa Li, and Yong Xu, “MEMS-Based Shear-Stress Sensor for Skin-Friction Measurements”, International instrumentation and measurement technology conference, Austin, TX, May 3-6, 2010.
  • Q. Zheng and Y. Xu, “Vibration energy harvesting device based on asymmetric air-spaced cantilevers for tire pressure monitoring system”, The 9th International Workshop on Micro and Nanotechnology for Power Generation and Energy Conversion Applications, Washington DC, USA, December 1-4, 2009.
  • R. Iezzi, P. Finlayson, X. Yong, and R. Katragadda, "Microfluidic neurotransmiter-based neural interfaces for retinal prosthesis," The 31st Annual International Conference of the IEEE Engineering in Medicine and Biology Society, Minneapolis, Minnesota, Sep. 3-6, 2009.
  • Q. Zheng, Z. Wang, and Y. Xu, “Design and optimization of parylene nanomechanical cantilevers with integrated piezoresistors for surface-stress based biochemical sensing”, the 4th IEEE international conference on nano/micro engineered and molecular systems, Shenzhen, China, Jan. 5-8, 2009.
  • R. B. Katragadda, Z. Wang and Y. Xu, “A high-sensitivity 3-D tactile sensor for minimally invasive surgery”, The 6th IEEE Conference on Sensors, Atlanta, Georgia, USA, Oct 28-31, 2007.
  • M.  Meng, Y. Xu, H. Zhang, and S. Liu, “Intelligent textiles based on MEMS technology”, The 57th Electronic Components & Technology Conference, Reno, Nevada, USA, May 29 - June 1, 2007.
  • Rakesh B. Katragadda and Yong Xu, “A novel intelligent textile technology based on silicon flexible skins”, Proceeding of the 20th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2007), Kobe, Japan, January 21 – 25, 2007.
  • Z. Wang, W. Khalid, and Y. Xu, “A Novel Lab-on-Tip Device for pico-Newton Lateral Force Measurement”, The Fifth IEEE Conference on Sensors, Daegu, Korea, Oct. 22~25, 2006.
  • R. B. Katragadda and Y. Xu, “Piezoresistive parylene cantilevers for biosensing applications”, The International Workshop on Nanomechanical Sensors”, Copenhagen, Denmark, May 7-10, 2006
  • Huan Zhang, Sheng Wang, and Yong Xu, “Study and applications of a parylene self-sealing structure”, The 19th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2006), Istanbul, Turkey, January 22 – 26, 2006.
  • W. Khalid, R. B. Katragadda, Y. Zhao, Q. Lin, Y. Xu, “Biosensors Based on Parylene Cantilevers”, The 9th International Conference on Miniaturized Systems for Chemistry and Life Sciences (µTAS), Boston, Massachusetts, USA October 9 - 13, 2005.
  • R. B. Katragadda and Y. Xu, “A Novel Intelligent Textile Technology Based on Silicon Flexible Skins”, The International symposium on wearable computer 2005 (ISWC05), Osaka, Japan, Oct. 18-21, 2005.
  • J. Clendenin, Y. Xu, and S. Tung, “A Novel Method for Determining Pressure Sensitivity of Underwater Shear-Stress Sensor Skins”, 2005 ASME International Mechanical Engineering Congress and Exposition, IMECE 2005, Nov 5-11 2005.
  • Y. Xu, J. Clendenen, S. Tung, F. Jiang, and Y.-C. Tai, "Underwater flexible shear-stress sensor skins," The 17th IEEE International Conference on Micro Electro Mechanical Systems (MEMS), Maastricht, The Netherlands, 2004.
  • Y. Xu, Y.-C. Tai, "Selective Parylene Deposition for Underwater Shear-Stress Sensor", The 12th International Conference on Solid-State Sensors, Actuators, and Microsystems (Transducers’03), Boston, 2003. 
  • Y.-C. Tai, F. Jiang, Y. Xu, M. Liger, S. Ho, and C.-M Ho, "Flexible MEMS Skins: Technologies and Applications," presented at Pacific Rim workshop on transducers and micro/nano technologies (invited talk), Xiamen, China, 2002.
  • Y. Xu, Y.-C. Tai, A. Huang, and C.-M. Ho, "IC-Integrated Flexible Shear-Stress Sensor Skin," Solid-State Sensor, Actuator, and Microsystems Workshop (Hilton Head), Hilton Head Island, South Carolina, 2002.
  • Y. Xu, F. Jiang, Q. Lin, J. Clendenen, S. Tung, and Y.-C. Tai, "Underwater Shear-Stress Sensor," The 15th IEEE International Conference on Micro Electro Mechanical Systems (MEMS), Las Vegas, Nevada, 2002.
  • L.-J. Yang, T.-J. Yao, Y.-L. Huang, Y. Xu, and Y.-C. Tai, "Marching Velocity of Capillary Meniscuses in Microchannels," The 15th IEEE International Conference on Micro Electro Mechanical Systems (MEMS), Las Vegas, Nevada, 2002.
  • A. Huang, C. Folk, C.-M. Ho, Z. Liu, W.W. Chu, Y. Xu and Y.-C. Tai, "Gryphon M3 system: integration of MEMS for flight control", SPIE's MEMS Components and Applications for Industry, Automobiles, Aerospace, and Communication, San Francisco, California, 2001
  • Y. Xu, F. Jiang, Y.-C. Tai, E. Donzier, W. Loomis, and A. Liberman, "A Surface Micromachined Nitride-Diaphragm High-Pressure Sensor for Oil Well Application," ASME International Mechanical Engineering Congress and Exposition, Orlando, Florida, 2000.
  • 22.  Y. Xu, C.-W. Chiu, F. Jiang, Q. Lin, and Y.-C. Tai, "Mass Flowmeter Using a Multi-Sensor Chip," The 13th IEEE International Conference on Micro Electro Mechanical Systems (MEMS), Miyazaki, Japan, 2000.
  • F. Jiang, Y. Xu, T. Weng, Z. Han, Y.-C. Tai, A. Huang, C.-M. Ho, and S. Newbern, "Flexible Shear Stress Sensor Skin for Aerodynamics Applications," The 13th IEEE International Conference on Micro Electro Mechanical Systems (MEMS), Miyazaki, Japan, 2000.
In the News
  • Yong Xu was featured in a CBS Detroit article on a technology he has developed that opens new possibilities for health care and medical applications of electronic devices.


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  • Yong Xu was featured in a New Electronics article on a technology he has developed that opens new possibilities for health care and medical applications of electronic devices.


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  • Yong Xu was featured on the website spacemart.com for the technology he has developed that opens new possibilities for health care and medical applications of electronic devices.


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  • Yong Xu was featured in a Solid State Technology article on a technology he has developed that opens new possibilities for health care and medical applications of electronic devices.


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  • Yong Xu was featured in an article on the Michigan University Research Corridor (URC) website on a technology he has developed that opens new possibilities for health care and medical applications of electronic devices.


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